Two complementary types of instruments are available in the Metrology service to assess the surface roughness: Mechanical that implies a probe in contact with the surface and optical, without contact.
The use of one or another depends on the measurement to be done and the material of the surface under study.
Mechanical roughness measurements (MITUTOYO CVS 3100):
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| Measurement range | 100 x 500 mm2 |
| Accuracy | +/- 10% (roughness) +/- 2 micrometers (forms) |
Optical measurements (VEECO 3D Optical 3D profiling and roughness system:
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| Measurement range | Table: 200 x 200 mm2 Height: VSI 2 mm x PSI 150 nm |
| Accuracy | VSI mode: +/- 1.50 nm PSI mode: +/- 0.03 nm |
| Other information | Software: Vision x1.5, x2.5, x5 and x20 lenses Max load: 30 kg MIRAU & MICHELSON interferometers |
Metrology working area in building 72